Ceramic Arm/Ceramic End Effector
Ceramic arm can be used in various semiconductor industries, such as photovoltaics, wafers, chip processing, etc.
Ceramic Arm Supplier
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Ceramic Shaft Description
Ceramic arms are key components in semiconductor manufacturing equipment, mainly used for wafer trays, wafer robotic arms, etc. They are responsible for accurately conveying and transporting wafers and silicon wafers to designated workstations. Equivalent to the “robot arm” of semiconductor equipment, it can ensure efficient and stable automated operation during the production process.
Compared with traditional metal robotic arms, ceramic arms can not only work in a specific vacuum environment, but you can also customize different structural types according to application requirements, such as clamping type, bearing type, vacuum adsorption type, etc.
Among them, the vacuum adsorption ceramic arm can achieve air adsorption through the built-in ventilation groove, making the handling process more stable and safe, and is suitable for high-precision and high-cleanliness semiconductor production environments.
Guarantee Manufacturing & Shipping Time
GORGEOUS is a leading manufacturer of ceramics for semiconductor wafer processing. We have 15 years of technology and experience in manufacturing advanced ceramics, and we are constantly optimizing and upgrading the manufacturing process of semiconductor ceramics. We can customize various components for you, such as ceramic arms, robot end effectors, ceramic wafer chucks, etc.
The packaging of the ceramic arm can be based on your needs, using hard environmentally friendly materials or soft foam protection.
Our ceramics are shipped all over the world, and the transportation of ceramics is affected by your location. We will quickly manufacture for you according to your plan and choose the best transportation method. The fastest air freight in North America, arrives in 7 days.
GORGEOUS chooses to cooperate with several leading logistics companies, including:
- MSC (Mediterranean Shipping Company)
- Maersk
- CMA CGM
- COSCO
- Hapag-Lloyd
- DHL
- UPS
- FedEx
- TNT
We work with multiple freight forwarders to guarantee you efficient shipping options at lower prices, on-time delivery, and no hidden fees!
Manufacturing
Packing
Loading
Transportation
Main Performance of Ceramic Arm/Ceramic End Effector
Lightweight
Wear-Resistant
Corrosion Resistant
High Temperature Resistance
Strong Insulation
GORGEOUS Customizable Product Accuracy Reference
| Minimum | Maximum | |
| Overall Thickness | 1.5mm | 4mm |
| Cavity Thickness | 0.5mm | 0.7mm |
| Thickness of The Gap Between The Cavity and The Surface | 0.5mm | – |
| Width of Cavity | 2mm | 6mm |
| Distance Limit From Edge | 2mm | – |
| Adsorption Pore Size | 0.5mm | – |
| Void Length | – | 360mm |
*The specific accuracy needs to be determined according to the actual product material, shape and process requirements.
Custom High Quality Ceramic Arm
✅Strong high temperature resistance
Can withstand extreme temperatures up to 1600℃ and has fast heat dissipation capabilities to ensure that your high temperature applications remain stable.
✅Lightweight design to reduce equipment burden
The weight of the ceramic arm is only half of that of the same metal part, which can greatly reduce the equipment load, improve operating efficiency, and reduce unnecessary energy consumption.
✅High wear resistance and insulation
The extremely high wear resistance can maintain precise operating performance for a long time. At the same time, the ceramic material has good electrical insulation, which effectively avoids electronic interference and ensures high stability of the semiconductor manufacturing process.
✅Corrosion resistance, suitable for harsh environments
Ceramic materials can resist acid and alkali corrosion and still maintain excellent performance in corrosive gas or liquid environments, making ceramics more widely applicable in some special process processes.
✅Optional anti-static coating
You can choose to spray anti-static Teflon coating on the surface, which can effectively reduce static electricity accumulation and avoid the impact of static electricity on semiconductor devices, thereby improving product yield.
Customized Arm Material Parameters and Selection
| Item | Unit | Zirconia |
| Density | g/cm3 | 6.0 |
| Zirconia Content | % | 94.4% |
| Grain Size | µm | 0.5 |
| Rockwell Hardness（45N） | R45N | 78 |
| Vickers Hardness（Load 500g） | GPa（Kg/mm2） | 11.5（1175） |
| Flexural Strength (20℃) | MPa | 800 |
| Compressive Strength (20℃) | MPa | 2000 |
| Fracture Toughness(20℃) | MPam1/2 | 9.0 |
| Thermal Conductivity(20℃-400℃) | W /（m.k） | 2.5 |
| Coefficient of Thermal Expansion | 10-6/℃ | 9.6 |
| Thermal Shock Resistance | △T℃ | 250 |
| Property | Unit | AL2O3 99.7 | AL2O3 99.5 | AL2O3 99 | AL2O3 95 |
| Purity | — | 99.7% | 99.5% | 99% | 95% |
| Density | g/cm3 | 3.92 | 3.9 | 3.8 | 3.7 |
| Bending Strength | MPa | 375 | 370 | 340 | 304 |
| Compressive Strength | MPa | 2450 | 2300 | 2250 | 1910 |
| Elastic Modulus | GPa | 380 | 370 | 330 | 330 |
| Fracture Toughness | MPam1/2 | 4.5 | 4.3 | 4.2 | 3.8 |
| Hardness | HRA | 91 | 91 | 90 | 89 |
| Vickers Hardness | HV1 | 1600 | 1550 | 1450 | 1400 |
| Thermal Expansion Coefficient | 10- 6 K-1 | 7.8 | 7.8 | 7.7 | 7.5 |
| Thermal Conductivity | W/mk | 32 | 32 | 25 | 25 |
| Thermal Shock Stability | △T.℃ | 220 | 220 | 200 | 200 |
| Maximum Operating Temperature | ℃ | 1750 | 1750 | 1700 | 1500 |
| Volume resistance at 20℃ | Ω·cm | 1015 | 1015 | 1014 | 1014 |
| Dielectric Strength | KV/mm | 22 | 20 | 16 | 15 |
| Dielectric Constant (room temperature) | / | 10 | 11 | 11.5 | 11 |
| MHz Dielectric Loss Factor | tan δ | 1×10-3 | 1×10-3 | 3×10-3 | 3×10-3 |
| Item | Unit | Silicon Nitride |
| Density | g/cm3 | ＞3.2 |
| Hardness | – | HRA90 |
| Vickers Hardness（Hv50） | HV0.5 | ＞1550 |
| Modulus of Elasticity | GPa | 290 |
| Flexural Strength | MPa | ＞600 |
| Compressive Strength | MPa | 2500 |
| Fracture Toughness | MPam1/2 | ＞6.0 |
| Maximum Use Temperature | ℃ | 1200 |
| Thermal Conductivity | W /（M·K） | 15-20 |
| Thermal Expansion Coefficient | 10-6/℃ | ＞3.1 |
| Thermal Shock Resistance | △T℃ | 500 |
| Specific Heat Capacity | KJ/kg·K | 700 |
| Dielectric Strength | KV/mm | 1 |
| Dielectric Constant | εr | – |
| Volume Resistivity at 20℃ | Ω.cm | 1.0×1012 |
Ceramic Arm/End Effector Standard Size Reference
Ceramic arms/end effectors are key components used to handle wafers in semiconductor manufacturing. We can customize them according to the size of the wafer, the type of equipment, and the process requirements. Here are some common standard sizes of ceramic arms for your reference!
Choose the Length of The Ceramic Arm According to The Wafer:
❇️6-inch wafer (150mm): Arm length: about 200-250mm
❇️8-inch wafer (200mm): Arm length: about 250-300mm
❇️12-inch wafer (300mm): Arm length: about 350-400mm
❇️18-inch wafer (450mm): Arm length: about 500-550mm
Ceramic Arm Width and Thickness
❇️Width: Typically 20-50mm, depending on your wafer size and required arm load capacity.
❇️Thickness: Typically 5-15mm, to ensure adequate strength and rigidity and reduce weight.
Arm End Design
❇️Fork design: commonly used for handling wafers, the width and spacing of the forks match the slots of the wafer box
❇️Vacuum suction cup design: can directly absorb the wafer, the common suction cup size is 10-20mm
❇️Edge clamping design: used for special processes, the clamping area width is 5-10mm
What Are The Uses of Ceramic Arms?
Industrial Robot Arm
Ceramic arms are used in high-precision, wear-resistant and corrosion-resistant industrial robots, and can work stably in some precision processing and high-temperature environments.
Semiconductor Manufacturing
In the chip manufacturing process, silicon wafers need to be transferred between different process steps (such as lithography, etching, deposition, etc.), and ceramic arms can act as handling manipulators in a dust-free environment.
Electronics Manufacturing
Electronic manufacturing ceramic arms are suitable for processes with high cleanliness requirements such as vacuum coating, chip manufacturing, and OLED display manufacturing. They can avoid the influence of thermal expansion of metal materials and improve stability.
Scientific Research
In laboratory equipment that requires resistance to corrosion and high temperature environments, ceramic arms can be used in fields such as chemical synthesis, plasma experiments and superconductivity research.
Food and Pharmaceutical Industry
Ceramic materials do not contain metal ion precipitation and are suitable for fields such as food processing and pharmaceutical packaging that require extremely high material cleanliness.
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Will the ceramic arm/ceramic end effector wear out over time?
Yes, the ceramic arm will wear out over time, especially in harsh and rough environments. But don’t worry too much, ceramic is a very hard and durable material, as long as it is properly maintained, you can use it for many years.
What would cause a ceramic arm to break?
Rapid temperature changes can cause thermal shock and cause the ceramic arm to break. Overloading, collision or severe impact beyond the rated capacity can also cause rupture.
How often should you check your ceramic arm?
Frequent inspections every week will allow you to detect problems early. Ceramic arms may wear, crack or become loose after long-term use. We recommend that you perform regular maintenance.