Ceramic Arm/Ceramic End Effector

Ceramic arm can be used in various semiconductor industries, such as photovoltaics, wafers, chip processing, etc.

Ceramic Arm Supplier

Customize Your Ceramics

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Optional materials: 95-99.9% alumina, zirconium oxide, silicon carbide, silicon nitride, ZTA, YSZ, etc.
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The basic size and flatness accuracy of GORGEOUS customized ceramic arms can reach 0.001~0.005mm, the minimum surface roughness is Ra 0.1μm, and other tolerances can also reach about 0.001~0.005, creating high-quality ceramics for you!
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At GORGEOUS, you can choose laser marking and CNC machine marking according to your needs and customize a unique solution for you.
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GORGEOUS serves customers in the global semiconductor industry. If you have different materials, precision issues and needs, you can contact us! (The ceramic products displayed are non-standard products and are customized according to your needs)

Ceramic Shaft Description

Ceramic arms are key components in semiconductor manufacturing equipment, mainly used for wafer trays, wafer robotic arms, etc. They are responsible for accurately conveying and transporting wafers and silicon wafers to designated workstations. Equivalent to the “robot arm” of semiconductor equipment, it can ensure efficient and stable automated operation during the production process.

Compared with traditional metal robotic arms, ceramic arms can not only work in a specific vacuum environment, but you can also customize different structural types according to application requirements, such as clamping type, bearing type, vacuum adsorption type, etc.

Among them, the vacuum adsorption ceramic arm can achieve air adsorption through the built-in ventilation groove, making the handling process more stable and safe, and is suitable for high-precision and high-cleanliness semiconductor production environments.

Guarantee Manufacturing & Shipping Time

GORGEOUS is a leading manufacturer of ceramics for semiconductor wafer processing. We have 15 years of technology and experience in manufacturing advanced ceramics, and we are constantly optimizing and upgrading the manufacturing process of semiconductor ceramics. We can customize various components for you, such as ceramic arms, robot end effectors, ceramic wafer chucks, etc.

The packaging of the ceramic arm can be based on your needs, using hard environmentally friendly materials or soft foam protection.

Our ceramics are shipped all over the world, and the transportation of ceramics is affected by your location. We will quickly manufacture for you according to your plan and choose the best transportation method. The fastest air freight in North America, arrives in 7 days.

GORGEOUS chooses to cooperate with several leading logistics companies, including:

  • MSC (Mediterranean Shipping Company)
  • Maersk
  • CMA CGM
  • COSCO
  • Hapag-Lloyd
  • DHL
  • UPS
  • FedEx
  • TNT

We work with multiple freight forwarders to guarantee you efficient shipping options at lower prices, on-time delivery, and no hidden fees!

Manufacturing

Packing

Loading

Transportation

Main Performance of Ceramic Arm/Ceramic End Effector

Lightweight

Wear-Resistant

Corrosion Resistant

High Temperature Resistance

Strong Insulation

GORGEOUS Customizable Product Accuracy Reference

Minimum Maximum
Overall Thickness 1.5mm 4mm
Cavity Thickness 0.5mm 0.7mm
Thickness of The Gap Between The Cavity and The Surface 0.5mm
Width of Cavity 2mm 6mm
Distance Limit From Edge 2mm
Adsorption Pore Size 0.5mm
Void Length 360mm

*The specific accuracy needs to be determined according to the actual product material, shape and process requirements.

Ceramic arm hollow one-piece molding process description

Custom High Quality Ceramic Arm

Strong high temperature resistance

Can withstand extreme temperatures up to 1600℃ and has fast heat dissipation capabilities to ensure that your high temperature applications remain stable.

 

 

 

Lightweight design to reduce equipment burden

The weight of the ceramic arm is only half of that of the same metal part, which can greatly reduce the equipment load, improve operating efficiency, and reduce unnecessary energy consumption.

 

 

 

High wear resistance and insulation

The extremely high wear resistance can maintain precise operating performance for a long time. At the same time, the ceramic material has good electrical insulation, which effectively avoids electronic interference and ensures high stability of the semiconductor manufacturing process.

 

 

 

Corrosion resistance, suitable for harsh environments

Ceramic materials can resist acid and alkali corrosion and still maintain excellent performance in corrosive gas or liquid environments, making ceramics more widely applicable in some special process processes.

 

 

 

Optional anti-static coating

You can choose to spray anti-static Teflon coating on the surface, which can effectively reduce static electricity accumulation and avoid the impact of static electricity on semiconductor devices, thereby improving product yield.

 

 

Customized Arm Material Parameters and Selection

Ceramic arm drawing
Item Unit Zirconia
Density g/cm3 6.0
Zirconia Content % 94.4%
Grain Size µm 0.5
Rockwell Hardness(45N) R45N 78
Vickers Hardness(Load 500g) GPa(Kg/mm2 11.5(1175)
Flexural Strength (20℃) MPa 800
Compressive Strength (20℃) MPa 2000
Fracture Toughness(20℃) MPam1/2 9.0
Thermal Conductivity(20℃-400℃) W /(m.k) 2.5
Coefficient of Thermal Expansion 10-6/℃ 9.6
Thermal Shock Resistance △T℃ 250

 

Property Unit AL2O3 99.7 AL2O3 99.5 AL2O3 99 AL2O3 95
Purity 99.7% 99.5% 99% 95%
Density g/cm3 3.92 3.9 3.8 3.7
Bending Strength MPa 375 370 340 304
Compressive Strength MPa 2450 2300 2250 1910
Elastic Modulus GPa 380 370 330 330
Fracture Toughness MPam1/2 4.5 4.3 4.2 3.8
Hardness HRA 91 91 90 89
Vickers Hardness HV1 1600 1550 1450 1400
Thermal Expansion Coefficient 10- 6    K-1 7.8 7.8 7.7 7.5
Thermal Conductivity W/mk 32 32 25 25
Thermal Shock Stability △T.℃ 220 220 200 200
Maximum Operating Temperature 1750 1750 1700 1500
Volume resistance at 20℃ Ω·cm 1015 1015 1014 1014
Dielectric Strength KV/mm 22 20 16 15
Dielectric Constant (room temperature) / 10 11 11.5 11
MHz Dielectric Loss Factor tan δ 1×10-3 1×10-3 3×10-3 3×10-3

 

Item Unit Silicon Nitride
Density g/cm3 >3.2
Hardness HRA90
Vickers Hardness(Hv50) HV0.5 >1550
Modulus of Elasticity GPa 290
Flexural Strength MPa >600
Compressive Strength MPa 2500
Fracture Toughness MPam1/2 >6.0
Maximum Use Temperature 1200
Thermal Conductivity W  /(M·K) 15-20
Thermal Expansion Coefficient 10-6/℃ >3.1
Thermal Shock Resistance △T℃ 500
Specific Heat Capacity KJ/kg·K 700
Dielectric Strength KV/mm 1
Dielectric Constant εr
Volume Resistivity at 20℃ Ω.cm 1.0×1012

Ceramic Arm/End Effector Standard Size Reference

Ceramic Arm

Ceramic arms/end effectors are key components used to handle wafers in semiconductor manufacturing. We can customize them according to the size of the wafer, the type of equipment, and the process requirements. Here are some common standard sizes of ceramic arms for your reference!

 

Choose the Length of The Ceramic Arm According to The Wafer:

❇️6-inch wafer (150mm):  Arm length: about 200-250mm

❇️8-inch wafer (200mm):  Arm length: about 250-300mm

❇️12-inch wafer (300mm):  Arm length: about 350-400mm

❇️18-inch wafer (450mm):  Arm length: about 500-550mm

Ceramic Arm Width and Thickness

❇️Width:  Typically 20-50mm, depending on your wafer size and required arm load capacity.

❇️Thickness:  Typically 5-15mm, to ensure adequate strength and rigidity and reduce weight.

 

Arm End Design

❇️Fork design:  commonly used for handling wafers, the width and spacing of the forks match the slots of the wafer box

❇️Vacuum suction cup design:  can directly absorb the wafer, the common suction cup size is 10-20mm

❇️Edge clamping design:  used for special processes, the clamping area width is 5-10mm

What Are The Uses of Ceramic Arms?

Industrial Robot Arm

Ceramic arms are used in high-precision, wear-resistant and corrosion-resistant industrial robots, and can work stably in some precision processing and high-temperature environments.

Semiconductor Manufacturing

In the chip manufacturing process, silicon wafers need to be transferred between different process steps (such as lithography, etching, deposition, etc.), and ceramic arms can act as handling manipulators in a dust-free environment.

Electronics Manufacturing

Electronic manufacturing ceramic arms are suitable for processes with high cleanliness requirements such as vacuum coating, chip manufacturing, and OLED display manufacturing. They can avoid the influence of thermal expansion of metal materials and improve stability.

Scientific Research

In laboratory equipment that requires resistance to corrosion and high temperature environments, ceramic arms can be used in fields such as chemical synthesis, plasma experiments and superconductivity research.

Food and Pharmaceutical Industry

Ceramic materials do not contain metal ion precipitation and are suitable for fields such as food processing and pharmaceutical packaging that require extremely high material cleanliness.

One-stop Ceramic Arm manufacturing service

15+ Years of Experience. High Precision and OEM Design. Professional R&D Team. Competitive Price.

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User Reviews
Will the ceramic arm/ceramic end effector wear out over time?

Yes, the ceramic arm will wear out over time, especially in harsh and rough environments. But don’t worry too much, ceramic is a very hard and durable material, as long as it is properly maintained, you can use it for many years.

What would cause a ceramic arm to break?

Rapid temperature changes can cause thermal shock and cause the ceramic arm to break. Overloading, collision or severe impact beyond the rated capacity can also cause rupture.

How often should you check your ceramic arm?

Frequent inspections every week will allow you to detect problems early. Ceramic arms may wear, crack or become loose after long-term use. We recommend that you perform regular maintenance.