Committed to providing you with special size and shape customization and solving batch color difference ceramic arm provider!

Ceramic Arm/Ceramic End Effector Supplier

Sesuaikan Keramik Anda

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Optional materials: 95-99.9% alumina, zirconium oxide, silicon carbide, silicon nitride, ZTA, YSZ, etc.
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The basic size and flatness accuracy of GORGEOUS customized ceramic arms can reach 0.001~0.005mm, the minimum surface roughness is Ra 0.1μm, and other tolerances can also reach about 0.001~0.005, creating high-quality ceramics for you!
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At GORGEOUS, you can choose laser marking and CNC machine marking according to your needs and customize a unique solution for you.
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GORGEOUS serves customers in the global semiconductor industry. If you have different materials, precision issues and needs, you can contact us! (The ceramic products displayed are non-standard products and are customized according to your needs)

Ceramic Arm Description

Ceramic robotic arms, also known as ceramic robotic fingers, wafer trays, round wafer robotic arms, etc., are mainly used for the transportation and handling of semiconductor equipment, and are responsible for delivering wafer silicon wafers to designated locations.

GORGEOUS product features:

▫️High product precision

▫️Excellent air tightness

▫️Good high temperature resistance

▫️Controllable surface resistivity

▫️Strong acid and alkali resistance and corrosion resistance, adaptable to various extreme harsh environments

🔷Self-tightness test: turn off the vacuum air source, negative pressure 85Kpa ke -80Kpa, for more than 60s

🔷Wafer adsorption test: turn off the vacuum air source, negative pressure -80Kpa ke -25Kpa, for more than 35s

Jaminan Waktu Pembuatan & Pengiriman

GORGEOUS is a leading manufacturer of ceramics for semiconductor wafer processing. We have 15 years of technology and experience in manufacturing advanced ceramics, and we are constantly optimizing and upgrading the manufacturing process of semiconductor ceramics. We can customize various components for you, such as ceramic arms, robot end effectors, ceramic wafer chucks, etc.

The packaging of the ceramic arm can be based on your needs, using hard environmentally friendly materials or soft foam protection.

Our ceramics are shipped all over the world, and the transportation of ceramics is affected by your location. We will quickly manufacture for you according to your plan and choose the best transportation method. The fastest air freight in North America, arrives in 7 days.

GORGEOUS memilih untuk bekerja sama dengan beberapa perusahaan logistik terkemuka, termasuk:

  • MSC (Perusahaan Pengiriman Mediterania)
  • Bahasa Indonesia: Maersk
  • CMA CGM
  • COSCO
  • Hapag Lloyd
  • Bahasa Indonesia: DHL
  • UPS
  • Layanan FedEx
  • TNT

Kami bekerja sama dengan banyak freight forwarder untuk menjamin Anda pilihan pengiriman yang efisien dengan harga yang lebih rendah, pengiriman tepat waktu, Dan tidak ada biaya tersembunyi!

Manufaktur

Sedang mengemas

Memuat

Angkutan

Main Performance of Ceramic Arm/Ceramic End Effector

Ringan

Tahan Aus

Tahan Korosi

Tahan Suhu Tinggi

Isolasi Kuat

Referensi Akurasi Produk yang Dapat Disesuaikan dan LUAR BIASA

Minimum Maximum
Overall Thickness 1.5mm 4mm
Cavity Thickness 0.5mm 0.7mm
Thickness of The Gap Between The Cavity and The Surface 0.5mm
Width of Cavity 2mm 6mm
Distance Limit From Edge 2mm
Adsorption Pore Size 0.5mm
Void Length 360mm

*Keakuratan spesifik perlu ditentukan berdasarkan bahan produk, bentuk, dan persyaratan proses aktual.

Ceramic arm for semiconductor equipment

Customize Various Types of Semiconductor Ceramic Arm

                        Robotic semiconductor equipment/ceramic robotic wafer handling/handling finger end effector          Robotic semiconductor equipment/ceramic robotic wafer handling/handling finger end effector          Robotic semiconductor equipment/ceramic robotic wafer handling/handling finger end effector

                        Ceramic Robot Arm/Semiconductor Wafer Equipment/Transport Arm          Ceramic Robot Arm/Semiconductor Wafer Equipment/Transport Arm          Ceramic Robot Arm/Semiconductor Wafer Equipment/Transport Arm2

                        Semiconductor Ceramic Arm          Garpu keramik semikonduktor          Semiconductor Ceramic Fork

                        Ceramic arm end detail1          Ceramic arm end detail2          Ceramic arm end detail3

Parameter dan Pemilihan Material Lengan yang Disesuaikan

Ceramic arm drawing
Barang Satuan Zirkonia
Kepadatan gram/cm3 6.0
Zirconia Content % 94.4%
Grain Size µm 0.5
Rockwell Hardness(45N) R45N 78
Vickers Hardness(Load 500g) GPa(Kg/mm2    ) 11.5(1175)
Flexural Strength (20℃) MPa 800
Compressive Strength (20℃) MPa 2000
Fracture Toughness(20℃) MPAM (Malaysia)1/2 9.0
Thermal Conductivity(20℃-400℃) W /(m.k) 2.5
Koefisien Ekspansi Termal 10-6   /℃ 9.6
Tahan terhadap Guncangan Termal △T℃ 250

 

Milik Satuan Bahasa Inggris2HAI3 99.7 Bahasa Inggris2HAI3 99.5 Bahasa Inggris2HAI3 99 Bahasa Inggris2HAI3 95
Kemurnian 99.7% 99.5% 99% 95%
Kepadatan gram/cm3 3.92 3.9 3.8 3.7
Kekuatan Tekuk MPa 375 370 340 304
Kekuatan Kompresi MPa 2450 2300 2250 1910
Modulus Elastisitas IPK 380 370 330 330
Ketahanan Retak MPAM (Malaysia)1/2 4.5 4.3 4.2 3.8
Kekerasan SDM 91 91 90 89
Kekerasan Vickers Bahasa Indonesia: HV1 1600 1550 1450 1400
Koefisien Ekspansi Termal 10- 6    Bahasa Inggris: K-1 7.8 7.8 7.7 7.5
Konduktivitas Termal Dengan/mk 32 32 25 25
Stabilitas Kejutan Termal △T.℃ 220 220 200 200
Suhu Operasional Maksimum 1750 1750 1700 1500
Resistensi volume pada 20℃ Ω·cm 1015 1015 1014 1014
Kekuatan Dielektrik KV/mm 22 20 16 15
Konstanta Dielektrik (suhu ruangan) / 10 11 11.5 11
Faktor Kerugian Dielektrik MHz warna coklat muda 1×10-3 1×10-3 3×10-3 3×10-3

 

Barang Satuan Silikon Nitrida
Kepadatan gram/cm3 >3.2
Kekerasan HRA90
Kekerasan Vickers (Hv50) HV0,5 >1550
Modulus Elastisitas IPK 290
Kekuatan Lentur MPa >600
Kekuatan Kompresi MPa 2500
Ketahanan Retak MPAM (Malaysia)1/2 > 6.0
Suhu Penggunaan Maksimum 1200
Konduktivitas Termal W / (P·K) 15-20
Koefisien Ekspansi Termal 10-6/℃ >3.1
Tahan terhadap Guncangan Termal △T℃ 500
Kapasitas Panas Spesifik J/kg·K 700
Kekuatan Dielektrik KV/mm 1
Konstanta Dielektrik lebih
Resistivitas Volume pada 20℃ Ω (satuan cm) 1,0×1012

Ceramic Arm/End Effector Standard Size Reference

Lengan Keramik

Ceramic arms/end effectors are key components used to handle wafers in semiconductor manufacturing. We can customize them according to the size of the wafer, the type of equipment, and the process requirements. Here are some common standard sizes of ceramic arms for your reference!

 

Choose the Length of The Ceramic Arm According to The Wafer:

❇️6-inch wafer (150mm):  Arm length: about 200-250mm

❇️8-inch wafer (200mm):  Arm length: about 250-300mm

❇️12-inch wafer (300mm):  Arm length: about 350-400mm

❇️18-inch wafer (450mm):  Arm length: about 500-550mm

Ceramic Arm Width and Thickness

❇️Width:  Typically 20-50mm, depending on your wafer size and required arm load capacity.

❇️Thickness:  Typically 5-15mm, to ensure adequate strength and rigidity and reduce weight.

 

Arm End Design

❇️Fork design:  commonly used for handling wafers, the width and spacing of the forks match the slots of the wafer box

❇️Vacuum suction cup design:  can directly absorb the wafer, the common suction cup size is 10-20mm

❇️Edge clamping design:  used for special processes, the clamping area width is 5-10mm

What Are The Uses of Ceramic Arms?

Industrial Robot Arm

Ceramic arms are used in high-precision, wear-resistant and corrosion-resistant industrial robots, and can work stably in some precision processing and high-temperature environments.

Pembuatan Semikonduktor

In the chip manufacturing process, silicon wafers need to be transferred between different process steps (such as lithography, etching, deposition, etc.), and ceramic arms can act as handling manipulators in a dust-free environment.

Manufaktur Elektronik

Electronic manufacturing ceramic arms are suitable for processes with high cleanliness requirements such as vacuum coating, chip manufacturing, and OLED display manufacturing. They can avoid the influence of thermal expansion of metal materials and improve stability.

Scientific Research

In laboratory equipment that requires resistance to corrosion and high temperature environments, ceramic arms can be used in fields such as chemical synthesis, plasma experiments and superconductivity research.

Industri Makanan dan Farmasi

Bahan keramik tidak mengandung presipitasi ion logam dan cocok untuk bidang seperti pengolahan makanan dan pengemasan farmasi yang memerlukan kebersihan material yang sangat tinggi.

One-stop Ceramic Arm manufacturing service

15+ Bertahun-tahun Pengalaman. Desain OEM dan Presisi Tinggi. Tim R&D Profesional. Harga Kompetitif.

Keberhasilan Kami dalam Lulus Testimoni

Ulasan Pengguna
Will the ceramic arm/ceramic end effector wear out over time?

Yes, the ceramic arm will wear out over time, especially in harsh and rough environments. But don’t worry too much, ceramic is a very hard and durable material, as long as it is properly maintained, you can use it for many years.

What would cause a ceramic arm to break?

Rapid temperature changes can cause thermal shock and cause the ceramic arm to break. Overloading, collision or severe impact beyond the rated capacity can also cause rupture.

How often should you check your ceramic arm?

Frequent inspections every week will allow you to detect problems early. Ceramic arms may wear, crack or become loose after long-term use. We recommend that you perform regular maintenance.