Aluminum nitride ceramic robotic arms, also known as aluminum nitride ceramic robotic fingers, wafer trays, or round wafer robotic arms, are mainly used for the transportation and handling of semiconductor equipment, responsible for delivering silicon wafers to designated locations.
Aluminum nitride robotic arms combine high thermal conductivity, excellent electrical insulation, a low coefficient of thermal expansion, and superior dimensional stability, greatly contributing to ensuring precise wafer transport and minimizing particle generation and thermal deformation.
GORGEOUS CERAMICS (GGS) can custom-produce aluminum nitride ceramic robotic arms based on customer-provided drawings and supports semiconductor equipment manufacturers (OEMs), automation integrators, and advanced equipment manufacturers worldwide.
Key Properties of Aluminum Nitride Ceramics
Conductividad térmica
Aluminum nitride ceramics boast a high thermal conductivity of 170–200 W/m·K, enabling rapid heat dissipation and minimizing temperature gradients during wafer processing.
Aislamiento eléctrico
The electrical insulation properties of aluminum nitride ceramics provide reliable electrical isolation for semiconductor devices operating under high voltage or sensitive process conditions.
Vacuum Compatibility
Aluminum nitride ceramics are ideally suited for vacuum chambers and cleanroom environments due to their low gas release characteristics.
Lightweight and Highly Rigid
Compared to metal robotic arms, aluminum nitride ceramic arms maintain structural integrity while minimizing deformation.
Referencia de tamaño estándar del brazo/efector final de cerámica
Elija la longitud del brazo cerámico según la oblea:
6-inch wafer (150mm): Arm length: about 200-250mm
8-inch wafer (200mm): Arm length: about 250-300mm
12-inch wafer (300mm): Arm length: about 350-400mm
18-inch wafer (450mm): Arm length: about 500-550mm
Ancho y grosor del brazo cerámico
Width: Typically 20-50mm, depending on your wafer size and required arm load capacity.
Thickness: Typically 5-15mm, to ensure adequate strength and rigidity and reduce weight.
Diseño del extremo del brazo
Fork design: commonly used for handling wafers, the width and spacing of the forks match the slots of the wafer box
Vacuum suction cup design: can directly absorb the wafer, the common suction cup size is 10-20mm
Edge clamping design: used for special processes, the clamping area width is 5-10mm
Applications of ceramic arms
En el proceso de fabricación de chips, es necesario transferir obleas de silicio entre diferentes pasos del proceso (como litografía, grabado, deposición, etc.) y los brazos de cerámica pueden actuar como manipuladores en un entorno libre de polvo.
Los brazos cerámicos para la fabricación electrónica son adecuados para procesos con altos requisitos de limpieza, como el recubrimiento al vacío, la fabricación de chips y la fabricación de pantallas OLED. Permiten evitar la influencia de la expansión térmica de los materiales metálicos y mejorar la estabilidad.
En equipos de laboratorio que requieren resistencia a la corrosión y a entornos de alta temperatura, se pueden utilizar brazos cerámicos en campos como la síntesis química, los experimentos de plasma y la investigación de superconductividad.
Los materiales cerámicos no contienen precipitación de iones metálicos y son adecuados para campos como el procesamiento de alimentos y el envasado farmacéutico que requieren una limpieza del material extremadamente alta.
Preguntas frecuentes
What is an aluminum nitride ceramic robotic arm?
An aluminum nitride ceramic robotic arm is a type of precision ceramic component widely used in semiconductor and automation equipment for wafer handling and material transfer.
Why choose aluminum nitride over metal robotic arms?
Because aluminum nitride ceramics have high thermal conductivity, excellent electrical insulation, and dimensional stability.
Can GORGEOUS CERAMICS (GGS) manufacture robotic arms according to customer drawings?
Yes, we can provide customized services based on customer specifications and CAD drawings.
