GORGEOUS CERAMICS (GGS Ceramic) silicon carbide ring chucks are made from spray-granulated silicon carbide powder, formed by isostatic pressing and high-temperature sintering, making them particularly suitable for manufacturing components used in semiconductor manufacturing processes.
Delivery time
GORGEOUS CERAMICS (GGS Ceramic) will complete an engineering assessment and quotation within 24 hours of receiving your drawings.
Standard samples can be completed within 3-4 weeks, and complex custom-made parts can be delivered within 4-6 weeks. For urgent product needs, we can open an expedited order channel for you.
Pacchetto
Inner layer protection: After cleaning and drying, each product will be individually sealed in an anti-static vacuum bag in a clean environment to isolate it from air and moisture.
Middle layer cushioning: High-density EPE pearl cotton is used to mold and groove the product at a 1:1 scale, with all-around fixation of the annular suction cups to prevent collisions and movement during transportation.
Performance advantages of silicon carbide ring chucks
Extremely high flatness control (≤1μm)
In core semiconductor processes such as photolithography, wafer defect inspection, and PSS patterned substrate etching, wafers rely on chucks for high-speed rotation and precise fixation.
A common pain point for our clients is the flatness deviation of the chucks, leading to various problems. GORGEOUS CERAMICS (GGS Ceramic)’s silicon carbide annular vacuum chucks utilize proprietary ultra-precision grinding and micron-level CNC machining processes to control flatness to ≤1μm, ensuring chuck stability!
Through near-perfect contact surfaces, our silicon carbide chucks eliminate localized wafer distortion under vacuum, ensuring sub-micron alignment accuracy and more uniform thermodynamic distribution, significantly improving your wafer yield.
Lightweight ultra-high rigidity structure
GORGEOUS CERAMICS (GGS Ceramic) silicon carbide chucks are a perfect combination of extremely low density (3.14 kg/dm^3) and ultra-high elastic modulus (420 GPa). This combination of lightweight design and high rigidity allows our silicon carbide chucks to significantly reduce motion inertia while ensuring zero deformation under extremely high acceleration.
Improved overall equipment response speed: High-density materials can lead to excessive mass in moving parts, significantly increasing overall acceleration and response speed.
Better high-frequency vibration and settling time: Excessive mass and insufficient rigidity in the suction cup can cause resonance between low-frequency and high-frequency structures during high-speed start-up and shutdown, resulting in prolonged settling time for the platform to reach the designated position. Our high rigidity and lightweight design effectively solves this problem.
Superior vibration resistance and stability: The high natural frequency and strong vibration resistance of our silicon carbide annular suction cup can quickly attenuate mechanical micro-vibrations caused by external interference, ensuring nanometer-level positioning accuracy.
Silicon carbide material performance table
|
Material properties |
parametro |
|
silicon carbide content |
≥99 |
|
densità |
3.14 kg/dm^3 |
|
elastic modulus |
420GPa |
Applications of silicon carbide ring chucks
Various lithography machines and stepper exposure equipment
- Compatible with Nikon: NSR-i11, NSR-i12, NSR-i14, NSR-4425i, and NSR-S215D series products.
- Compatible with Canon: FPA-3030iWa, FPA-3030i6, FPA-3030i5a
- Compatible with ASML: PAS 5500 series.
Various etching equipment
- Compatible with NAURA: Elesys series and Preforma series ICP etching machines
- Compatible with AMEC: Primo D-RIE, Primo SSC AD-RIE, and other etching equipment
- Compatible with Lam Research: Kiyo series, Centura/Producer series, ICP/RIE etching platforms, etc.
Domande frequenti
1. What are the advantages of silicon carbide (SiC) ring-shaped chucks compared to alumina (Al₂O₃) ceramic chucks?
Compared to alumina ceramics, silicon carbide ceramics have higher hardness and rigidity, an extremely low coefficient of thermal expansion, and high thermal conductivity, giving them a significant advantage.
2. How important is the flatness of silicon carbide chucks to wafer processing?
In processes such as photolithography and patterned substrates, the flatness of the chuck ensures that the wafer remains highly flat under vacuum adsorption, improving photolithographic alignment accuracy and pattern uniformity, thereby directly increasing wafer yield.
3. Which brands of equipment are compatible with GORGEOUS CERAMICS (GGS Ceramic) silicon carbide ring chucks?
Our chucks are compatible with various mainstream semiconductor equipment, such as:
- Photolithography/exposure equipment: Nikon (e.g., NSR-i11/i12/i14, NSR-4425i series), Canon (e.g., FPA-3030iWa/i5a/i6 series), ASML (PAS 5500 series), and SUSS MicroTec
- Dry etching equipment: NAURA, AMEC, Lam Research, Applied Materials
- Defect detection and inspection equipment: KLA, Nikon, etc.
4. What precautions should be taken during the daily installation and use of the suction cup?
Before installation, ensure that the contact surface between the base of the machine and the suction cup is free of particles and impurities. If there is a buildup of particles on the surface, we recommend using high-purity isopropyl alcohol with a lint-free cloth to gently wipe along the direction of the annular groove. Do not use hard objects to scrape.
