Research Progress on Laser Metallization of AlN Surface

Aluminum nitride is now a popular material in the electronic industry, it has a high thermal conductivity (100~200 W · m–1·K–1), yes Al2O3Of 5-to 10-fold, low dielectric constant and dielectric loss, mechanical properties, and chemical stability This  article  summarizes  the  r esearch  development  in  China  and  beyond.Firstly, it  analyzes  the  mechanism  of  AlN  surface  laser  metallization,  afterwards  it  reports   and   classifies   the   influence   of  key  paramet ers.Simply  to   say,  the  conductive  aluminum  layer  on the AlN  surface  is produced by the  thermal  decomposit ion  AlN  into  aluminum  and  nitrogen  duo to  laser  induced  ultrahigh  temperature.The  main  indicators  to  measure  the  metallization  effect  include  the  thickness  and conductivity of  the aluminum layer.The electrical properties of  the metallic  layer  on  AlN  surface  are  mainly  determin ed by  laser wavelength, laser  operating parameters, energy  distribution  and  ambient  atmo sphere.The  influence mechanism  of these  factors is  analyzed  briefly.Ultimately, some  optimization  measures  for  laser  meta llization  are  summarized  in  view  of the  defects  of  uneven  thickness  and  large  resistance  of  the  metallized  conductive  layer  in  the  laser  metallization  process .

Research_Progress_on_Laser_Metallization__of__AlN__Surface