Aluminum nitride ceramic disks are ceramic products that combine thermal conductivity and electrical insulation, making them ideal for thermal management and precision engineering applications.
Compared to alumina ceramics, aluminum nitride offers significantly higher thermal conductivity while maintaining excellent dielectric properties, making it a superior heat dissipation product.
Several semiconductor equipment manufacturers are customizing aluminum nitride ceramic wafers with GORGEOUS CERAMICS (GGS) for use in high-temperature wafer fabrication systems. After evaluating various ceramic materials, customers ultimately chose aluminum nitride because it combines high thermal conductivity with electrical insulation.
GORGEOUS CERAMICS (GGS) is capable of manufacturing precision aluminum nitride ceramic wafers ranging in diameter from 50 mm to 180 mm, and controlling their flatness to customer specifications. can customize aluminum nitride ceramic disks of various diameters, thicknesses, and precisions to meet customer requirements.
Typical Applications of Aluminum Nitride Ceramic Disks
Semiconductor Applications: The main application of aluminum nitride disks is in semiconductor equipment, used for wafer support substrates, electrostatic chuck assemblies, heat sinks, and vacuum cavity insulation components.
Power Electronics: Aluminum nitride disks are used in power electronics for IGBT modules, power semiconductor packaging, high-power LED systems, and heat sinks.
Laser Systems: Due to their excellent heat dissipation capabilities, aluminum nitride disks are used in laser systems as laser mounting substrates and thermal management components.
Vacuum Equipment: Aluminum nitride disks are used in vacuum equipment as vacuum insulating discs, cavity support assemblies, high-temperature vacuum fixtures, and industrial heating systems.
Performance of aluminum nitride ceramics
Technical specifications, material properties, and performance data are typical values and are for reference only. Actual values may vary depending on manufacturing tolerances, testing conditions, material grades, and application environments.
For critical engineering applications, please contact GORGEOUS CERAMICS (GGS) for detailed material reports, inspection data, and technical support.
| 名前 | AlN/窒化アルミニウム | |||
| 密度 | グラム/cm3 | 3.31 | ||
| 弾性係数 | GPa | 310 | ||
| 破壊靭性 | Mpa xm^1/2 | 3.5 | ||
| 毒物比率 | – | 0.25 | ||
| 圧縮強度 | MPa | 2100 | ||
| 曲げ強度 | MPa | 335 | ||
| 硬度（ビッカース） | GPa | 11 | ||
| 硬度（ヌープ100g） | kg/mm2 | 1170 | ||
| 名前 | AlN/窒化アルミニウム | |||
| 最高気温 | 酸化 | 750°C | 不活性 | 1300℃ |
| 熱伝導率 | 25℃ | 180W/mK | 300℃で | 130W/mK |
| 比熱 | 760J/kg・K | |||
| 耐熱衝撃性 ΔT | 400°C | |||
| 膨張係数（10^-6/°C） | 熱膨張係数 25°C ➞ 300°C | 4.6 | 熱膨張係数 25°C ➞ 1000°C | 5.6 |
| 誘電率 | 8.6 （1MHz） | |||
| ロスタンジェント | 5×10^-4（1MHz） | |||
| 体積抵抗率 | 25℃ | >10^13Ω・cm | 500℃ | 10^7Ω・cm |
よくある質問
Why use aluminum nitride ceramic discs instead of alumina ceramic discs?
Because aluminum nitride discs have a thermal conductivity approximately 7-10 times higher than alumina discs, and also offer excellent electrical insulation.
Can your aluminum nitride ceramic discs be manufactured to custom sizes?
Yes, GORGEOUS CERAMICS (GGS) can manufacture custom diameters, thicknesses, hole diameters, grooves, and other processes according to drawings.
Which industries use aluminum nitride ceramic disks?
Semiconductors, power electronics, electric vehicle systems, laser equipment, vacuum technology, aerospace, and advanced industrial machinery.
Are aluminum nitride ceramic disks suitable for vacuum environments?
Yes, high-purity aluminum nitride ceramics have excellent vacuum compatibility and dimensional stability, making them suitable for vacuum environments.
