Aluminum nitride ceramic robotic arms, also known as aluminum nitride ceramic robotic fingers, wafer trays, or round wafer robotic arms, are mainly used for the transportation and handling of semiconductor equipment, responsible for delivering silicon wafers to designated locations.
Aluminum nitride robotic arms combine high thermal conductivity, excellent electrical insulation, a low coefficient of thermal expansion, and superior dimensional stability, greatly contributing to ensuring precise wafer transport and minimizing particle generation and thermal deformation.
GORGEOUS CERAMICS (GGS) can custom-produce aluminum nitride ceramic robotic arms based on customer-provided drawings and supports semiconductor equipment manufacturers (OEMs), automation integrators, and advanced equipment manufacturers worldwide.
Key Properties of Aluminum Nitride Ceramics
열전도도
Aluminum nitride ceramics boast a high thermal conductivity of 170–200 W/m·K, enabling rapid heat dissipation and minimizing temperature gradients during wafer processing.
전기 절연
The electrical insulation properties of aluminum nitride ceramics provide reliable electrical isolation for semiconductor devices operating under high voltage or sensitive process conditions.
Vacuum Compatibility
Aluminum nitride ceramics are ideally suited for vacuum chambers and cleanroom environments due to their low gas release characteristics.
Lightweight and Highly Rigid
Compared to metal robotic arms, aluminum nitride ceramic arms maintain structural integrity while minimizing deformation.
세라믹 암/엔드 이펙터 표준 크기 참조
웨이퍼에 따라 세라믹 암의 길이를 선택하세요:
6-inch wafer (150mm): Arm length: about 200-250mm
8-inch wafer (200mm): Arm length: about 250-300mm
12-inch wafer (300mm): Arm length: about 350-400mm
18-inch wafer (450mm): Arm length: about 500-550mm
세라믹 암 폭 및 두께
Width: Typically 20-50mm, depending on your wafer size and required arm load capacity.
Thickness: Typically 5-15mm, to ensure adequate strength and rigidity and reduce weight.
암 엔드 디자인
Fork design: commonly used for handling wafers, the width and spacing of the forks match the slots of the wafer box
Vacuum suction cup design: can directly absorb the wafer, the common suction cup size is 10-20mm
Edge clamping design: used for special processes, the clamping area width is 5-10mm
Applications of ceramic arms
칩 제조 공정에서는 실리콘 웨이퍼를 여러 공정 단계(예: 리소그래피, 에칭, 증착 등)로 옮겨야 하며, 세라믹 암은 먼지가 없는 환경에서 핸들링 조작기 역할을 할 수 있습니다.
전자 제조용 세라믹 암은 진공 코팅, 칩 제조, OLED 디스플레이 제조 등 높은 청정도가 요구되는 공정에 적합합니다. 금속 재료의 열팽창 영향을 피하고 안정성을 향상시킬 수 있습니다.
부식과 고온 환경에 대한 저항성이 요구되는 실험실 장비에서 세라믹 암은 화학 합성, 플라즈마 실험, 초전도 연구 등의 분야에 사용될 수 있습니다.
세라믹 소재는 금속 이온 침전을 포함하지 않으며, 매우 높은 재료 청결성이 요구되는 식품 가공 및 제약품 포장과 같은 분야에 적합합니다.
자주 묻는 질문
What is an aluminum nitride ceramic robotic arm?
An aluminum nitride ceramic robotic arm is a type of precision ceramic component widely used in semiconductor and automation equipment for wafer handling and material transfer.
Why choose aluminum nitride over metal robotic arms?
Because aluminum nitride ceramics have high thermal conductivity, excellent electrical insulation, and dimensional stability.
Can GORGEOUS CERAMICS (GGS) manufacture robotic arms according to customer drawings?
Yes, we can provide customized services based on customer specifications and CAD drawings.
