ALN 히터 우리의 주요 제품 중 하나입니다. 두 세계의 장점을 결합:세라믹과 금속. 이 혁신적인 디자인은 을 통해 달성됨 금속화, 다양한 용도에 적합한 완벽한 솔루션입니다. 반도체 및 전자 장비 제조 필요.
우리는 활용합니다 고성능 알루미늄 질화물 소재 ALN 히터에 뛰어난 열 균일성과 내식성을 부여합니다. 이상적으로 적합하게 만들어줍니다 웨이퍼 처리. 또한, 우리는 제공합니다 맞춤형 서비스 귀하의 다양한 요구 사항을 충족하기 위해 당신을 돕는 생산 및 처리 효율성 향상 귀하의 제품의 품질을 향상시키세요.
Aluminum Nitride Heater Applications
Used in Semiconductor Manufacturing Equipment
Aluminum nitride heaters possess high thermal conductivity, excellent insulation properties, resistance to plasma corrosion, and uniform heating capabilities, making them suitable for use in wafer manufacturing equipment such as wafer chuck heaters, electrostatic chuck heaters (ESC heaters), and chemical vapor deposition (CVD) equipment.
GORGEOUS CERAMICS (GGS) has partnered with numerous semiconductor equipment manufacturers and wafer foundries, custom-shipping multiple batches of aluminum nitride ceramic heating elements, which have received widespread acclaim.
Used in vacuum equipment
Aluminum nitride heaters can operate stably for extended periods in high vacuum environments without releasing contaminants, making them an ideal choice for vacuum systems.
Common applications include vacuum chamber heating, vacuum stage heating, sample heating platforms, vacuum transfer modules, and analytical instruments.
Characteristics of ALN heaters
Temperature Uniformity:
GORGEOUS CERAMICS (GGS) aluminum nitride heaters are made from highly thermally conductive aluminum nitride, ensuring excellent temperature uniformity over a wide temperature range (up to 790 degrees Celsius). This translates to temperature stability during wafer fabrication, ultimately improving product yield and production speed.
공간 절약형 디자인:
By co-sintering the resistance heating element and bulk RF electrode within the aluminum nitride ceramic, we have achieved a compact and efficient design for the aluminum nitride heater. This not only reduces the overall size of the equipment but also improves heating efficiency and heat transfer rate, thus saving valuable production space.
부식 저항성:
Aluminum nitride ceramic heaters exhibit excellent resistance to corrosion from halogen gases and oxidizing environments. This allows them to maintain long-term stability under high-temperature and continuous operation conditions, extending equipment life and reducing daily operating and maintenance costs.
Wafer Clamping Function Design Pending:
By sintering the RF electrode together with the ceramic plate, the aluminum nitride heater integrates the function of an electrostatic chuck electrode for wafer clamping. This feature simplifies your production process, thereby increasing production speed and efficiency—a highly valuable advantage in wafer fabrication.
맞춤형 솔루션:
We understand that every manufacturing process has unique requirements. Therefore, we offer customized aluminum nitride heater solutions to meet your diverse needs. Whether it’s size, power requirements, or electrode configuration, we can tailor products to your specific manufacturing process for a perfect fit.
ALN Material Properties Data
다음 표는 AlN 소재의 주요 특성을 요약한 것입니다.
이름
순도[%]
밀도 [g/cm³]
체적 저항률 [Ωcm] (실온)
열전도도 [W/m·K] (실온)
열팽창계수(1000℃)
강도 [MPa] (실온)
영률[GPa] (실온)
유전율(13.56MHz, 릴레이)
AlN/알루미늄 질화물
95
3.3
>1E+15
170
5.7
>300
300
8.6
AlN/알루미늄 질화물
97
3.31
>1E+8 ~ +13
100
5.6
>300
300
8.8
AlN/알루미늄 질화물
99
3.32
>1E+15
80
5.6
>250
300
8.6
자주 묻는 질문
What are the applications of aluminum nitride heaters?
Aluminum nitride heaters are primarily used in semiconductor equipment, vacuum systems, OLED manufacturing, laboratory instruments, medical devices, and laser equipment.
Why choose aluminum nitride heaters instead of alumina heaters?
Aluminum nitride heaters have a much higher thermal conductivity (several times that of alumina ceramics), enabling faster heat transfer, better temperature uniformity, and superior thermal management.
Can GORGEOUS CERAMICS (GGS) aluminum nitride heaters be customized?
Yes. Customization is available for dimensions, thickness, heating circuit, operating voltage, power density, temperature sensors (e.g., thermocouples or RTDs), mounting holes, metallization, and surface treatments.
What is the maximum operating temperature of aluminum nitride heaters?
Aluminum nitride heaters typically operate continuously within a temperature range of 400°C to 800°C.
