Aluminum nitride ceramic robotic arms, also known as aluminum nitride ceramic robotic fingers, wafer trays, or round wafer robotic arms, are mainly used for the transportation and handling of semiconductor equipment, responsible for delivering silicon wafers to designated locations.
Aluminum nitride robotic arms combine high thermal conductivity, excellent electrical insulation, a low coefficient of thermal expansion, and superior dimensional stability, greatly contributing to ensuring precise wafer transport and minimizing particle generation and thermal deformation.
GORGEOUS CERAMICS (GGS) can custom-produce aluminum nitride ceramic robotic arms based on customer-provided drawings and supports semiconductor equipment manufacturers (OEMs), automation integrators, and advanced equipment manufacturers worldwide.
Key Properties of Aluminum Nitride Ceramics
热导率
Aluminum nitride ceramics boast a high thermal conductivity of 170–200 W/m·K, enabling rapid heat dissipation and minimizing temperature gradients during wafer processing.
电气绝缘
The electrical insulation properties of aluminum nitride ceramics provide reliable electrical isolation for semiconductor devices operating under high voltage or sensitive process conditions.
Vacuum Compatibility
Aluminum nitride ceramics are ideally suited for vacuum chambers and cleanroom environments due to their low gas release characteristics.
Lightweight and Highly Rigid
Compared to metal robotic arms, aluminum nitride ceramic arms maintain structural integrity while minimizing deformation.
陶瓷臂/末端执行器标准尺寸参考
根据晶圆选择陶瓷臂的长度：
6-inch wafer (150mm): Arm length: about 200-250mm
8-inch wafer (200mm): Arm length: about 250-300mm
12-inch wafer (300mm): Arm length: about 350-400mm
18-inch wafer (450mm): Arm length: about 500-550mm
陶瓷臂宽度和厚度
Width: Typically 20-50mm, depending on your wafer size and required arm load capacity.
Thickness: Typically 5-15mm, to ensure adequate strength and rigidity and reduce weight.
臂端设计
Fork design: commonly used for handling wafers, the width and spacing of the forks match the slots of the wafer box
Vacuum suction cup design: can directly absorb the wafer, the common suction cup size is 10-20mm
Edge clamping design: used for special processes, the clamping area width is 5-10mm
Applications of ceramic arms
在芯片制造过程中，硅片需要在不同的工艺步骤（如光刻、刻蚀、沉积等）之间进行转移，陶瓷臂可以在无尘环境中充当搬运机械手。
电子制造陶瓷臂适用于真空镀膜、芯片制造、OLED显示屏制造等对洁净度要求较高的工艺，可避免金属材料热膨胀的影响，提高稳定性。
在需要耐腐蚀和高温环境的实验室设备中，陶瓷臂可用于化学合成、等离子体实验和超导研究等领域。
陶瓷材料不含金属离子析出，适用于食品加工、医药包装等对材料洁净度要求极高的领域。
常问问题
What is an aluminum nitride ceramic robotic arm?
An aluminum nitride ceramic robotic arm is a type of precision ceramic component widely used in semiconductor and automation equipment for wafer handling and material transfer.
Why choose aluminum nitride over metal robotic arms?
Because aluminum nitride ceramics have high thermal conductivity, excellent electrical insulation, and dimensional stability.
Can GORGEOUS CERAMICS (GGS) manufacture robotic arms according to customer drawings?
Yes, we can provide customized services based on customer specifications and CAD drawings.
