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Ceramic Arm/Ceramic End Effector Supplier

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Optional materials: 95-99.9% alumina, zirconium oxide, silicon carbide, silicon nitride, ZTA, YSZ, etc.

The basic size and flatness accuracy of GORGEOUS customized ceramic arms can reach 0.001~0.005mm, the minimum surface roughness is Ra 0.1μm, and other tolerances can also reach about 0.001~0.005, creating high-quality ceramics for you!

At GORGEOUS, you can choose laser marking and CNC machine marking according to your needs and customize a unique solution for you.

GORGEOUS serves customers in the global semiconductor industry. If you have different materials, precision issues and needs, you can contact us! (The ceramic products displayed are non-standard products and are customized according to your needs)

Ceramic Arm Description

Ceramic robotic arms, also known as ceramic robotic fingers, wafer trays, round wafer robotic arms, etc., are mainly used for the transportation and handling of semiconductor equipment, and are responsible for delivering wafer silicon wafers to designated locations.

GORGEOUS product features：

▫️High product precision

▫️Excellent air tightness

▫️Good high temperature resistance

▫️Controllable surface resistivity

▫️Strong acid and alkali resistance and corrosion resistance, adaptable to various extreme harsh environments

🔷Self-tightness test: turn off the vacuum air source, negative pressure –85Kpa に -80Kpa, for more than 60s

🔷Wafer adsorption test: turn off the vacuum air source, negative pressure -80Kpa に -25Kpa, for more than 35s

Guarantee Manufacturing & Shipping Time

GORGEOUS is a leading manufacturer of ceramics for semiconductor wafer processing. We have 15 years of technology and experience in manufacturing advanced ceramics, and we are constantly optimizing and upgrading the manufacturing process of semiconductor ceramics. We can customize various components for you, such as ceramic arms, robot end effectors, ceramic wafer chucks, etc.

The packaging of the ceramic arm can be based on your needs, using hard environmentally friendly materials or soft foam protection.

Our ceramics are shipped all over the world, and the transportation of ceramics is affected by your location. We will quickly manufacture for you according to your plan and choose the best transportation method. The fastest air freight in North America, arrives in 7 days.

GORGEOUS chooses to cooperate with several leading logistics companies, including:

MSC (Mediterranean Shipping Company)
Maersk
CMA CGM
COSCO
Hapag-Lloyd
DHL
UPS
FedEx
TNT

We work with multiple freight forwarders to guarantee you efficient shipping options at lower prices, on-time delivery, and no hidden fees!

Manufacturing

Packing

Loading

Transportation

Main Performance of Ceramic Arm/Ceramic End Effector

Lightweight

Wear-Resistant

Corrosion Resistant

耐高温性

Strong Insulation

GORGEOUS Customizable Product Accuracy Reference

	Minimum	Maximum
Overall Thickness	1.5mm	4mm
Cavity Thickness	0.5mm	0.7mm
Thickness of The Gap Between The Cavity and The Surface	0.5mm	–
Width of Cavity	2mm	6mm
Distance Limit From Edge	2mm	–
Adsorption Pore Size	0.5mm	–
Void Length	–	360mm

*The specific accuracy needs to be determined according to the actual product material, shape and process requirements.

Ceramic arm for semiconductor equipment

Customize Various Types of Semiconductor Ceramic Arm

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Ceramic arm drawing

Item	ユニット	ジルコニア
密度	g/cm³	6.0
Zirconia Content	%	94.4%
Grain Size	µm	0.5
Rockwell Hardness（45N）	R45N	78
Vickers Hardness（Load 500g）	GPa（Kg/mm²）	11.5（1175）
Flexural Strength (20℃)	MPa	800
Compressive Strength (20℃)	MPa	2000
Fracture Toughness(20℃)	MPam^1/2	9.0
Thermal Conductivity(20℃-400℃)	W /（m.k）	2.5
熱膨張係数	10^-6/℃	9.6
Thermal Shock Resistance	△T℃	250

財産	ユニット	アル₂お₃ 99.7	アル₂お₃ 99.5	アル₂お₃ 99	アル₂お₃ 95
純度	—	99.7%	99.5%	99%	95%
密度	g/cm³	3.92	3.9	3.8	3.7
曲げ強度	MPa	375	370	340	304
圧縮強度	MPa	2450	2300	2250	1910
弾性係数	GPa	380	370	330	330
破壊靭性	MPam^1/2	4.5	4.3	4.2	3.8
硬度	HRA	91	91	90	89
ビッカース硬度	HV1	1600	1550	1450	1400
熱膨張係数	10^{- 6}K^-1	7.8	7.8	7.7	7.5
熱伝導率	W/mk	32	32	25	25
熱衝撃安定性	△T.℃	220	220	200	200
最大動作温度	℃	1750	1750	1700	1500
20℃における体積抵抗	Ω·cm	10¹⁵	10¹⁵	10¹⁴	10¹⁴
絶縁強度	KV/mm	22	20	16	15
誘電率（室温）	/	10	11	11.5	11
MHz誘電損失係数	tan δ	1×10^-3	1×10^-3	3×10^-3	3×10^-3

Item	ユニット	窒化シリコン
密度	g/cm³	＞3.2
硬度	–	HRA90
Vickers Hardness（Hv50）	HV0.5	＞1550
Modulus of Elasticity	GPa	290
Flexural Strength	MPa	＞600
圧縮強度	MPa	2500
破壊靭性	MPam^1/2	＞6.0
Maximum Use Temperature	℃	1200
熱伝導率	W /（M·K）	15-20
熱膨張係数	10^-6/℃	＞3.1
Thermal Shock Resistance	△T℃	500
Specific Heat Capacity	KJ/kg·K	700
絶縁強度	KV/mm	1
誘電率	εr	–
Volume Resistivity at 20℃	Ω.cm	1.0×10¹²

Ceramic Arm/End Effector Standard Size Reference

セラミックアーム

Ceramic arms/end effectors are key components used to handle wafers in semiconductor manufacturing. We can customize them according to the size of the wafer, the type of equipment, and the process requirements. Here are some common standard sizes of ceramic arms for your reference!

Choose the Length of The Ceramic Arm According to The Wafer:

❇️6-inch wafer (150mm): Arm length: about 200-250mm

❇️8-inch wafer (200mm): Arm length: about 250-300mm

❇️12-inch wafer (300mm): Arm length: about 350-400mm

❇️18-inch wafer (450mm): Arm length: about 500-550mm

Ceramic Arm Width and Thickness

❇️Width: Typically 20-50mm, depending on your wafer size and required arm load capacity.

❇️Thickness: Typically 5-15mm, to ensure adequate strength and rigidity and reduce weight.

Arm End Design

❇️Fork design: commonly used for handling wafers, the width and spacing of the forks match the slots of the wafer box

❇️Vacuum suction cup design: can directly absorb the wafer, the common suction cup size is 10-20mm

❇️Edge clamping design: used for special processes, the clamping area width is 5-10mm

What Are The Uses of Ceramic Arms?

Industrial Robot Arm

Ceramic arms are used in high-precision, wear-resistant and corrosion-resistant industrial robots, and can work stably in some precision processing and high-temperature environments.

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Semiconductor Manufacturing

In the chip manufacturing process, silicon wafers need to be transferred between different process steps (such as lithography, etching, deposition, etc.), and ceramic arms can act as handling manipulators in a dust-free environment.

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Electronics Manufacturing

Electronic manufacturing ceramic arms are suitable for processes with high cleanliness requirements such as vacuum coating, chip manufacturing, and OLED display manufacturing. They can avoid the influence of thermal expansion of metal materials and improve stability.

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Scientific Research

In laboratory equipment that requires resistance to corrosion and high temperature environments, ceramic arms can be used in fields such as chemical synthesis, plasma experiments and superconductivity research.

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食品・医薬品業界

セラミック材料には金属イオンの沈殿が含まれず、非常に高い材料清浄度が要求される食品加工や医薬品包装などの分野に適しています。

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One-stop Ceramic Arm manufacturing service

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Will the ceramic arm/ceramic end effector wear out over time?

Yes, the ceramic arm will wear out over time, especially in harsh and rough environments. But don’t worry too much, ceramic is a very hard and durable material, as long as it is properly maintained, you can use it for many years.

What would cause a ceramic arm to break?

Rapid temperature changes can cause thermal shock and cause the ceramic arm to break. Overloading, collision or severe impact beyond the rated capacity can also cause rupture.

How often should you check your ceramic arm?

Frequent inspections every week will allow you to detect problems early. Ceramic arms may wear, crack or become loose after long-term use. We recommend that you perform regular maintenance.

先進セラミックサプライヤーおよびメーカー: +8613606062178

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