Committed to providing you with special size and shape customization and solving batch color difference ceramic arm provider！

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Alumina ceramic handling arm/Ceramic arm for semiconductor equipment

Silicon nitride ceramic arm/Ceramic arm for wafer handling

Ceramic Arm/Silicon nitride ceramic arm

Alumina Ceramic Arm - Front/Customized ceramic arm

Alumina Ceramic Arm - Back/Customized ceramic arm

99 Alumina Ceramic Arm/Ceramic arm for wafer transfer

Alumina Ceramic Handling Arm/Clamping-type ceramic arm

Silicon nitride ceramic arm/High-precision alumina ceramic arm

Silicon carbide ceramic arm/High-temperature resistant zirconia ceramic arm

ceramic arm/Alumina ceramic arm/Corrosion-resistant ceramic arm

Alumina ceramic handling arm/Ceramic arm for semiconductor equipment
Silicon nitride ceramic arm/Ceramic arm for wafer handling
Ceramic Arm/Silicon nitride ceramic arm
Alumina Ceramic Arm - Front/Customized ceramic arm
Alumina Ceramic Arm - Back/Customized ceramic arm
99 Alumina Ceramic Arm/Ceramic arm for wafer transfer
Alumina Ceramic Handling Arm/Clamping-type ceramic arm
Silicon nitride ceramic arm/High-precision alumina ceramic arm
Silicon carbide ceramic arm/High-temperature resistant zirconia ceramic arm
ceramic arm/Alumina ceramic arm/Corrosion-resistant ceramic arm

Ceramic Arm/Ceramic End Effector Supplier

Tùy chỉnh đồ gốm của bạn

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Optional materials: 95-99.9% alumina, zirconium oxide, silicon carbide, silicon nitride, ZTA, YSZ, etc.
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The basic size and flatness accuracy of GORGEOUS customized ceramic arms can reach 0.001~0.005mm, the minimum surface roughness is Ra 0.1μm, and other tolerances can also reach about 0.001~0.005, creating high-quality ceramics for you!
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At GORGEOUS, you can choose laser marking and CNC machine marking according to your needs and customize a unique solution for you.
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GORGEOUS serves customers in the global semiconductor industry. If you have different materials, precision issues and needs, you can contact us! (The ceramic products displayed are non-standard products and are customized according to your needs)

Ceramic Arm Description

Ceramic robotic arms, also known as ceramic robotic fingers, wafer trays, round wafer robotic arms, etc., are mainly used for the transportation and handling of semiconductor equipment, and are responsible for delivering wafer silicon wafers to designated locations.

GORGEOUS product features：

▫️High product precision

▫️Excellent air tightness

▫️Good high temperature resistance

▫️Controllable surface resistivity

▫️Strong acid and alkali resistance and corrosion resistance, adaptable to various extreme harsh environments

🔷Self-tightness test: turn off the vacuum air source, negative pressure –85Kpa ĐẾN -80Kpa, for more than 60s

🔷Wafer adsorption test: turn off the vacuum air source, negative pressure -80Kpa ĐẾN -25Kpa, for more than 35s

Đảm bảo thời gian sản xuất và vận chuyển

GORGEOUS is a leading manufacturer of ceramics for semiconductor wafer processing. We have 15 years of technology and experience in manufacturing advanced ceramics, and we are constantly optimizing and upgrading the manufacturing process of semiconductor ceramics. We can customize various components for you, such as ceramic arms, robot end effectors, ceramic wafer chucks, etc.

The packaging of the ceramic arm can be based on your needs, using hard environmentally friendly materials or soft foam protection.

Our ceramics are shipped all over the world, and the transportation of ceramics is affected by your location. We will quickly manufacture for you according to your plan and choose the best transportation method. The fastest air freight in North America, arrives in 7 days.

GORGEOUS lựa chọn hợp tác với một số công ty hậu cần hàng đầu, bao gồm:

  • MSC (Công ty vận tải biển Địa Trung Hải)
  • Maersk
  • CMA-CGM
  • COSCO
  • Hapag-Lloyd
  • DHL
  • UPS
  • FedEx
  • TNT

Chúng tôi làm việc với nhiều công ty giao nhận hàng hóa để đảm bảo cho bạn các lựa chọn vận chuyển hiệu quả với giá thấp hơn, giao hàng đúng hạn, Và không có phí ẩn!

Chế tạo

Đóng gói

Đang tải

Vận tải

Main Performance of Ceramic Arm/Ceramic End Effector

Nhẹ

Chống mài mòn

Corrosion Resistant

Khả năng chịu nhiệt độ cao

Strong Insulation

GORGEOUS Customizable Product Accuracy Reference

Minimum Maximum
Overall Thickness 1.5mm 4mm
Cavity Thickness 0.5mm 0.7mm
Thickness of The Gap Between The Cavity and The Surface 0.5mm –
Width of Cavity 2mm 6mm
Distance Limit From Edge 2mm –
Adsorption Pore Size 0.5mm –
Void Length – 360mm

*Độ chính xác cụ thể cần được xác định theo yêu cầu thực tế về vật liệu, hình dạng và quy trình sản phẩm.

Ceramic arm for semiconductor equipment

Customize Various Types of Semiconductor Ceramic Arm

                        Robotic semiconductor equipment/ceramic robotic wafer handling/handling finger end effector          Robotic semiconductor equipment/ceramic robotic wafer handling/handling finger end effector          Robotic semiconductor equipment/ceramic robotic wafer handling/handling finger end effector

                        Ceramic Robot Arm/Semiconductor Wafer Equipment/Transport Arm          Ceramic Robot Arm/Semiconductor Wafer Equipment/Transport Arm          Ceramic Robot Arm/Semiconductor Wafer Equipment/Transport Arm2

                        Semiconductor Ceramic Arm          Semiconductor ceramic fork          Semiconductor Ceramic Fork

                        Ceramic arm end detail1          Ceramic arm end detail2          Ceramic arm end detail3

Thông số vật liệu cánh tay tùy chỉnh và lựa chọn

Ceramic arm drawing
Item Đơn vị Zirconia
Tỉ trọng g/cm3 6.0
Zirconia Content % 94.4%
Grain Size µm 0.5
Rockwell Hardness（45N） R45N 78
Vickers Hardness（Load 500g） GPa（Kg/mm2    ) 11.5（1175）
Flexural Strength (20℃) MPa 800
Compressive Strength (20℃) MPa 2000
Fracture Toughness(20℃) MPam1/2 9.0
Thermal Conductivity(20℃-400℃) W /（m.k） 2.5
Hệ số giãn nở nhiệt 10-6   /℃ 9.6
Thermal Shock Resistance △T℃ 250

 

Tài sản Đơn vị AL2Ồ3 99.7 AL2Ồ3 99.5 AL2Ồ3 99 AL2Ồ3 95
Độ tinh khiết — 99.7% 99.5% 99% 95%
Tỉ trọng g/cm3 3.92 3.9 3.8 3.7
Sức mạnh uốn cong MPa 375 370 340 304
Sức mạnh nén MPa 2450 2300 2250 1910
Mô đun đàn hồi Điểm trung bình 380 370 330 330
Độ bền gãy MPam1/2 4.5 4.3 4.2 3.8
Độ cứng HRA 91 91 90 89
Độ cứng Vickers HV1 1600 1550 1450 1400
Hệ số giãn nở nhiệt 10- 6    K-1 7.8 7.8 7.7 7.5
Độ dẫn nhiệt Có/không 32 32 25 25
Độ ổn định sốc nhiệt △T.℃ 220 220 200 200
Nhiệt độ hoạt động tối đa ℃ 1750 1750 1700 1500
Sức cản thể tích ở 20℃ Ω·cm 1015 1015 1014 1014
Độ bền điện môi KV/mm 22 20 16 15
Hằng số điện môi (nhiệt độ phòng) / 10 11 11.5 11
Hệ số tổn thất điện môi MHz tan δ 1×10-3 1×10-3 3×10-3 3×10-3

 

Item Đơn vị Silic Nitride
Tỉ trọng g/cm3 ＞3.2
Độ cứng – HRA90
Vickers Hardness（Hv50） HV0.5 ＞1550
Mô đun đàn hồi Điểm trung bình 290
Độ bền uốn MPa ＞600
Sức mạnh nén MPa 2500
Độ bền gãy MPam1/2 ＞6.0
Maximum Use Temperature ℃ 1200
Độ dẫn nhiệt W  /（M·K） 15-20
Hệ số giãn nở nhiệt 10-6/℃ ＞3.1
Thermal Shock Resistance △T℃ 500
Specific Heat Capacity KJ/kg·K 700
Độ bền điện môi KV/mm 1
Hằng số điện môi εr –
Volume Resistivity at 20℃ Ω.cm 1.0×1012

Ceramic Arm/End Effector Standard Size Reference

Cánh tay gốm

Ceramic arms/end effectors are key components used to handle wafers in semiconductor manufacturing. We can customize them according to the size of the wafer, the type of equipment, and the process requirements. Here are some common standard sizes of ceramic arms for your reference!

 

Choose the Length of The Ceramic Arm According to The Wafer:

❇️6-inch wafer (150mm):  Arm length: about 200-250mm

❇️8-inch wafer (200mm):  Arm length: about 250-300mm

❇️12-inch wafer (300mm):  Arm length: about 350-400mm

❇️18-inch wafer (450mm):  Arm length: about 500-550mm

Ceramic Arm Width and Thickness

❇️Width:  Typically 20-50mm, depending on your wafer size and required arm load capacity.

❇️Thickness:  Typically 5-15mm, to ensure adequate strength and rigidity and reduce weight.

 

Arm End Design

❇️Fork design:  commonly used for handling wafers, the width and spacing of the forks match the slots of the wafer box

❇️Vacuum suction cup design:  can directly absorb the wafer, the common suction cup size is 10-20mm

❇️Edge clamping design:  used for special processes, the clamping area width is 5-10mm

What Are The Uses of Ceramic Arms?

Industrial Robot Arm

Ceramic arms are used in high-precision, wear-resistant and corrosion-resistant industrial robots, and can work stably in some precision processing and high-temperature environments.

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Sản xuất chất bán dẫn

In the chip manufacturing process, silicon wafers need to be transferred between different process steps (such as lithography, etching, deposition, etc.), and ceramic arms can act as handling manipulators in a dust-free environment.

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Electronics Manufacturing

Electronic manufacturing ceramic arms are suitable for processes with high cleanliness requirements such as vacuum coating, chip manufacturing, and OLED display manufacturing. They can avoid the influence of thermal expansion of metal materials and improve stability.

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Scientific Research

In laboratory equipment that requires resistance to corrosion and high temperature environments, ceramic arms can be used in fields such as chemical synthesis, plasma experiments and superconductivity research.

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Ngành công nghiệp thực phẩm và dược phẩm

Vật liệu gốm không chứa kết tủa ion kim loại và phù hợp với các lĩnh vực như chế biến thực phẩm và đóng gói dược phẩm đòi hỏi độ sạch của vật liệu cực kỳ cao.

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One-stop Ceramic Arm manufacturing service

15+ Nhiều năm kinh nghiệm. Thiết kế OEM và độ chính xác cao. Đội ngũ R&D chuyên nghiệp. Giá cả cạnh tranh.

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Đánh giá của người dùng
Will the ceramic arm/ceramic end effector wear out over time?

Yes, the ceramic arm will wear out over time, especially in harsh and rough environments. But don’t worry too much, ceramic is a very hard and durable material, as long as it is properly maintained, you can use it for many years.

What would cause a ceramic arm to break?

Rapid temperature changes can cause thermal shock and cause the ceramic arm to break. Overloading, collision or severe impact beyond the rated capacity can also cause rupture.

How often should you check your ceramic arm?

Frequent inspections every week will allow you to detect problems early. Ceramic arms may wear, crack or become loose after long-term use. We recommend that you perform regular maintenance.