Aluminum nitride ceramic robotic arms, also known as aluminum nitride ceramic robotic fingers, wafer trays, or round wafer robotic arms, are mainly used for the transportation and handling of semiconductor equipment, responsible for delivering silicon wafers to designated locations.
Aluminum nitride robotic arms combine high thermal conductivity, excellent electrical insulation, a low coefficient of thermal expansion, and superior dimensional stability, greatly contributing to ensuring precise wafer transport and minimizing particle generation and thermal deformation.
GORGEOUS CERAMICS (GGS) can custom-produce aluminum nitride ceramic robotic arms based on customer-provided drawings and supports semiconductor equipment manufacturers (OEMs), automation integrators, and advanced equipment manufacturers worldwide.
Key Properties of Aluminum Nitride Ceramics
Isıl İletkenlik
Aluminum nitride ceramics boast a high thermal conductivity of 170–200 W/m·K, enabling rapid heat dissipation and minimizing temperature gradients during wafer processing.
Elektriksel Yalıtım
The electrical insulation properties of aluminum nitride ceramics provide reliable electrical isolation for semiconductor devices operating under high voltage or sensitive process conditions.
Vacuum Compatibility
Aluminum nitride ceramics are ideally suited for vacuum chambers and cleanroom environments due to their low gas release characteristics.
Lightweight and Highly Rigid
Compared to metal robotic arms, aluminum nitride ceramic arms maintain structural integrity while minimizing deformation.
Seramik Kol/Uç Efektörü Standart Boyut Referansı
Seramik Kol Uzunluğunu Wafer'a Göre Seçin:
6-inch wafer (150mm): Arm length: about 200-250mm
8-inch wafer (200mm): Arm length: about 250-300mm
12-inch wafer (300mm): Arm length: about 350-400mm
18-inch wafer (450mm): Arm length: about 500-550mm
Seramik Kol Genişliği ve Kalınlığı
Width: Typically 20-50mm, depending on your wafer size and required arm load capacity.
Thickness: Typically 5-15mm, to ensure adequate strength and rigidity and reduce weight.
Kol Ucu Tasarımı
Fork design: commonly used for handling wafers, the width and spacing of the forks match the slots of the wafer box
Vacuum suction cup design: can directly absorb the wafer, the common suction cup size is 10-20mm
Edge clamping design: used for special processes, the clamping area width is 5-10mm
Applications of ceramic arms
Çip üretim sürecinde, silikon yongaların farklı işlem adımları (litografi, aşındırma, biriktirme vb.) arasında aktarılması gerekir ve seramik kollar tozsuz bir ortamda taşıma manipülatörü olarak işlev görebilir.
Elektronik üretim seramik kolları, vakum kaplama, çip üretimi ve OLED ekran üretimi gibi yüksek temizlik gereksinimleri olan işlemler için uygundur. Metal malzemelerin termal genleşmesinin etkisinden kaçınabilir ve kararlılığı artırabilirler.
Korozyona ve yüksek sıcaklık ortamlarına dayanıklılık gerektiren laboratuvar ekipmanlarında, kimyasal sentez, plazma deneyleri ve süperiletkenlik araştırmaları gibi alanlarda seramik kollar kullanılabilir.
Seramik malzemeler metal iyon çökelmesi içermez ve gıda işleme ve ilaç paketleme gibi son derece yüksek malzeme temizliği gerektiren alanlar için uygundur.
SSS
What is an aluminum nitride ceramic robotic arm?
An aluminum nitride ceramic robotic arm is a type of precision ceramic component widely used in semiconductor and automation equipment for wafer handling and material transfer.
Why choose aluminum nitride over metal robotic arms?
Because aluminum nitride ceramics have high thermal conductivity, excellent electrical insulation, and dimensional stability.
Can GORGEOUS CERAMICS (GGS) manufacture robotic arms according to customer drawings?
Yes, we can provide customized services based on customer specifications and CAD drawings.
