Silicon Carbide Vertical Wafer Boat

GORGEOUS CERAMICS (GGS) 3D printed one-piece molding requires no molds and has grooves machined by CNC machine tools or wire cutting, resulting in burrs-free molding that will not scratch the silicon wafer.

SiC ceramic vertical wafer boat used in diffusion and oxidation furnaces


Silicon Carbide Vertical Crystal Boat Performance Advantages

 

1. High-Density Structure: This product boasts excellent high-temperature resistance and resistance to acid and alkali corrosion, making it suitable for various harsh process environments.

2. High Purity: Our product has an impurity content of less than 1000 ppm, effectively reducing the risk of contamination and meeting the stringent cleanliness requirements of semiconductor processes.

3. Structural Stability: It maintains structural stability under prolonged high temperatures, effectively reducing the occurrence of problems such as jamming and deformation.

4. Long Service Life and Low Maintenance Costs: Our product exhibits outstanding wear and corrosion resistance, reducing replacement frequency and improving equipment operating efficiency.

High temperature silicon carbide vertical wafer boat with excellent thermal stability

 


FAQ

Why choose a silicon carbide vertical wafer boat instead of a quartz or silicon wafer boat?

Because silicon carbide has higher mechanical strength, better thermal stability, and better resistance to chemical corrosion.

Are silicon carbide vertical wafer boats suitable for high-temperature semiconductor processes?

Yes, silicon carbide vertical wafer boats possess excellent high-temperature resistance and low thermal deformation capability, making them an ideal choice for processes with extremely high requirements for long-term thermal stability, such as diffusion, oxidation, and low-pressure chemical vapor deposition (LPCVD).

How do high-purity silicon carbide vertical wafer boats benefit wafer processing?

Silicon carbide vertical wafer boats have impurity content below 1000 ppm, which effectively reduces the risk of contamination and improves wafer yield in semiconductor manufacturing.