Yarıiletken Seramikler

From wafer processing, vacuum adsorption, precision assembly to high temperature processes, GORGEOUS provides customers with one-stop customized semiconductor ceramic solutions.

Precision Ceramic Structural Parts

Pan-Semiconductor Industry

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GORGEOUS can customize various semiconductor equipment components for customers - ceramic arms, electrostatic chucks, nozzles, etching rings, etching windows, etc.
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From raw material selection to product characteristic analysis and design, we help you customize semiconductor ceramics for your application.
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We use only high-quality, high-purity fine powders to manufacture semiconductor ceramic parts that are more resistant to wear and corrosion, giving your products a longer life.
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Our product quality is 100% guaranteed, and the raw material process is transparent and traceable!
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Fast manufacturing and rapid delivery to ensure you have no worries after sales.

Semiconductor Ceramics Description

Advanced ceramics are a critical part of semiconductor manufacturing equipment. A large amount of plasma is generated during the semiconductor manufacturing process, and it is crucial to use plasma-resistant materials as equipment components. Compared with metals, resins, and glass, advanced ceramics are more high-performance and reliable. Their resistivity is usually between conductors and insulators, and their electrical insulation is excellent, making them very suitable for semiconductor manufacturing processes.

We provide you with all the ceramic materials you need:

Alümina (Al2O3)  —  Ultra-high purity and rigidity;

Aluminum nitride (AlN)  —  Excellent thermal conductivity and insulation;

Silicon nitride (Si3N4)  —  Ultra-high fracture toughness and low thermal expansion coefficient;

Silicon Carbide (SiSiC) Low density and coefficient of thermal expansion.

Based on your needs, we can recommend the best material for you to create ultra-high precision semiconductor ceramic components for you!

 

Üretim ve Kargo Süresi Garantisi

GORGEOUS cooperates with several leading international logistics companies to produce for you quickly and deliver the products to you on time and intact!

Seramiklerin üretimi ve nakliyesi, süreçten ve konumunuzdan etkilenir. Planınıza göre bunları sizin için hızlı bir şekilde üreteceğiz ve en iyi nakliye yöntemini seçeceğiz. Kuzey Amerika'daki en hızlı hava teslimatı, 7 günde ulaşır.

The logistics companies we cooperate with include:

  • MSC (Akdeniz Nakliye Şirketi)
  • Maersk
  • CMA CGM
  • KOZKO
  • Hapag-Lloyd
  • DHL
  • GÜÇ KAYNAĞI
  • FedEx
  • TNT

Daha düşük fiyatlarla verimli nakliye seçenekleri garantilemek için birden fazla nakliye acentesiyle çalışıyoruz. zamanında teslimat, Ve gizli ücret yok!

Üretme

Paketleme

Yükleniyor

Toplu taşıma

Main Properties of Semiconductor Ceramics

Yüksek Sertlik

Aşınmaya dayanıklı

Korozyona dayanıklı

Yüksek Sıcaklık Direnci

Güçlü Yalıtım

GORGEOUS Özelleştirilebilir Ürün Doğruluk Referansı

Processing Technology parameter Achievable accuracy
Frezeleme Flatness, parallelism, Ra Ra≥0,05 μm”
Flatness<1μm
Bileme Flatness 5 μm < Ø 200 mm / 10 μm > Ø 200 mm
Pürüzlülük Ra from 0,15 μm to 0,6 μm
Paralellik 5 μm < Ø 200 mm / 10 μm > Ø 200 mm
Eroding Symmetrical Max. 0.05mm (hole/positioning slot)
Cilalama Flatness, Parallelism, Roughness Ra0.06μm-0.35μm
Flatness<2μm
Parallelism<2μm
Structuring Pürüzlülük Roughness < 3,2 μm
Size < 150 μm

*Belirli doğruluk, gerçek ürün malzemesi, şekli ve proses gereksinimlerine göre belirlenmelidir.

Yarıiletken Seramikler

Semiconductor Ceramic Optional Process

Product Type Special Requests
Seramik Alt Tabaka Polishing, metallization coating, gold plating
Seramik Kol Mirror polishing, ventilation slots, anti-static coating
Ceramic Rings/Gaskets Sandblasting, Teflon coating, surface coating
Seramik Tüp Inner wall polishing, hot isostatic pressing, surface coating
Ceramic Suction Cup Micro hole processing, blind hole processing, adsorption vent design
Ceramic Heating Element Metallized coating, surface glaze, antistatic coating

 

                         Alumina ceramic chuck | Microporous chuck | Porous ceramic chuck | Wafer chuck | Ceramic chuck | Semiconductor equipment parts | CMP equipment chuck          Alumina ceramic disc | Canon lithography equipment parts | Alumina ceramic cleaning stone | Semiconductor equipment ceramic accessories          Semiconductor Ceramic Ring

                         Semiconductor Ceramic Ring          Semiconductor Ceramic Ring          Semiconductor Ceramic Ring

                         Semiconductor Ceramic Ring          Semiconductor equipment parts 99.7 alumina ceramics Industrial ceramics          Silicon carbide ceramic parts/crucible holder/ceramic holder/ceramic fixture

                         Semiconductor fixture/Silicon carbide ceramic parts/Platinum crucible support/Ceramic crucible support          Semiconductor fixture/Silicon carbide ceramic parts/Platinum crucible support/Ceramic crucible support          Semiconductor ceramic robot

                         Semiconductor accessories          Semiconductor ceramic parts | Precision mechanical handles | Alumina ceramic special-shaped parts          Yarı iletken seramik çatal

 

Customized Semiconductor Ceramic Material Parameters and Selection

Semiconductor ceramic chuck
Öğe Birim Silisyum Nitrür
Yoğunluk g/cm3 >3.2
Sertlik HRA90
Vickers Sertliği (Hv50) YüksekV0.5 >1550
Elastiklik Modülü Not ortalaması 290
Eğilme Dayanımı MPa >600
Basınç Dayanımı MPa 2500
Kırılma Tokluğu Milletvekili1/2 >6.0
Maksimum Kullanım Sıcaklığı 1200
Isıl İletkenlik H /(M·K) 15-20
Isıl Genleşme Katsayısı 10-6    /℃ >3.1
Isıl Şok Direnci △T℃ 500
Özgül Isı Kapasitesi KJ/kg·K 700
Dielektrik Dayanımı kV/mm 1
Dielektrik sabiti sen
20℃'de Hacim Direnci Ω.cm 1,0×1012

 

Öğe Birim Basınçsız Sinterlenmiş Silisyum Karbür Reaction Bonded Silicon Carbide Recrystallized Sintered Silicon Carbide
Maksimum Çalışma Sıcaklığı 1600 1380 1650
Yoğunluk g/cm3 >3.1 >3.02 >2.6
Gözeneklilik % <0.1 <0.1 15%
Bükülme Gücü MPa >400 250(20℃) 90-100(20℃)
MPa 280(1200℃) 100-120(1100℃)
Elastiklik Modülü Not ortalaması 420 330(20℃) 240
Not ortalaması 300(1200℃)
Isıl İletkenlik W/m.k 74 45(1200℃) 24
Isıl Genleşme Katsayısı K-1×10-6 4.1 4.5 4.8
Vickers Sertliği Not ortalaması 22 20
Acid and Alkali Resistance excellent excellent excellent

 

Mülk Birim AL2O3 99.7 AL2O3 99.5 AL2O3 99 AL2O3 95
Saflık 99.7% 99.5% 99% 95%
Yoğunluk g/cm3 3.92 3.9 3.8 3.7
Bükülme Gücü MPa 375 370 340 304
Basınç Dayanımı MPa 2450 2300 2250 1910
Elastiklik Modülü Not ortalaması 380 370 330 330
Kırılma Tokluğu Milletvekili1/2 4.5 4.3 4.2 3.8
Sertlik İnsan Hakları Derneği 91 91 90 89
Vickers Sertliği Yüksek V1 1600 1550 1450 1400
Isıl Genleşme Katsayısı 10- 6    K-1 7.8 7.8 7.7 7.5
Isıl İletkenlik W/mk 32 32 25 25
Termal Şok Kararlılığı △T.℃ 220 220 200 200
Maksimum Çalışma Sıcaklığı 1750 1750 1700 1500
20℃'de hacim direnci Ω·cm 1015 1015 1014 1014
Dielektrik Dayanımı kV/mm 22 20 16 15
Dielektrik Sabiti (oda sıcaklığı) / 10 11 11.5 11
MHz Dielektrik Kayıp Faktörü bronz δ 1×10-3 1×10-3 3×10-3 3×10-3

 

Öğe Birim Alüminyum Nitrür
Yoğunluk g/cm3 3.31
Elastiklik Modülü Not ortalaması 310
Kırılma Tokluğu MPa × m1/2 3.5
Poisson oranı 0.25
Compressive MPa 2100
Eğilme Dayanımı MPa 335
Sertlik (Vickers) Not ortalaması 11
Hardness (Knoop 100g) Kg/mm2 1170

 

Özelleştirilebilir Seramik Şaft ucu Tip Referansı

What are semiconductor ceramics?

Alumina material products

❇️Wafer Polishing Plates:High hardness and wear resistance ensure high precision and long life of wafer polishing.

❇️End Effectors / Wafer-Handling:Excellent mechanical strength and chemical stability, suitable for wafer handling in high-cleanliness environments.

❇️Metalised Products:Good electrical conductivity and high temperature resistance, suitable for high power electronic devices.

❇️Chamber Rings / Sputtering Targets:High purity and corrosion resistance ensure the stability and consistency of the thin film deposition process.

Silicon Carbide Material Products

❇️Wafer Polishing Plates:Extremely high hardness and thermal conductivity, suitable for efficient and high-precision wafer polishing.

❇️Electrostatic Chucks:Excellent thermal conductivity and electrical insulation ensure stable adsorption of wafers at high temperatures.

❇️Vacuum Chucks:High strength and heat resistance, suitable for wafer fixing in high vacuum environment.

❇️End Effectors / Wafer-Handling:Lightweight and highly rigid, suitable for high-speed, high-precision wafer handling.

❇️Chamber Rings:Excellent high temperature and corrosion resistance, suitable for harsh semiconductor process environments.

What are The Uses of Semiconductor Ceramics?

Ceramic Robot Arm/Ceramic End Processor

The ceramic arm plays the role of conveying and carrying in semiconductor equipment, which is equivalent to the arm of the robot of semiconductor equipment. It is mainly responsible for transporting wafers and silicon chips to designated locations.

Semiconductor Ceramic Heater

Semiconductor heaters have excellent thermal conductivity, high temperature resistance and electrical insulation. They can heat up quickly and evenly, and are widely used in semiconductor manufacturing, optoelectronic equipment and other scenarios.

Vacuum Wafer Ceramic Chuck

Vacuum wafer chuck is an important device for precision machining and semiconductor manufacturing, designed for fixing and handling silicon wafers or other thin materials. It can use the principle of vacuum adsorption to ensure that the wafer is stable and does not move during processing, testing or cleaning.

Semiconductor Equipment Parts

Many semiconductor devices use advanced ceramic products, such as ceramic insulating disks, ceramic insulating rings, thermistors, gas-sensitive ceramics, photosensitive ceramics, etc.

One-stop Semiconductor Ceramic Manufacturing Service

15+ Yılların Deneyimi. Yüksek Hassasiyet ve OEM Tasarımı. Profesyonel Ar-Ge Ekibi. Rekabetçi Fiyat.

Geçiş Başarılarımız Referanslar

Kullanıcı Yorumları
What is the service life of your products?

Our semiconductor ceramic products have excellent durability and can work stably for a long time in high temperature, high pressure and corrosive environments, reducing your replacement costs.

How to choose materials?

According to different application scenarios, we recommend you to choose the right material:

  • Aluminum nitride (AlN): It has excellent thermal conductivity (>170 W/m·K) and electrical insulation, and is suitable for high-power semiconductor devices.
  • Aluminum oxide (Al₂O₃): It has good mechanical strength and corrosion resistance and is widely used in conventional electronic components.
  • Silicon nitride (Si₃N₄): It has both high temperature stability and impact resistance, and is particularly suitable for key components in harsh environments.
Your customization capabilities

We support customization of various specifications and complex structures. Whether it is micron-level precision processing or the manufacturing of special-shaped parts, we can meet your requirements.