Обогреватель ALN is one of our featured products, combining the best of both worlds:ceramics and metal. This innovative design, achieved through металлизация, makes it the perfect solution for your various semiconductor and electronic equipment manufacturing needs.
Мы используем high-performance aluminum nitride material to endow the ALN Heater with exceptional thermal uniformity and corrosion resistance, making it ideally suited for wafer processing. Кроме того, we offer customized services to cater to your diverse needs, helping you improve production and processing efficiency while enhancing the quality of your products.
Aluminum Nitride Heater Applications
Used in Semiconductor Manufacturing Equipment
Aluminum nitride heaters possess high thermal conductivity, excellent insulation properties, resistance to plasma corrosion, and uniform heating capabilities, making them suitable for use in wafer manufacturing equipment such as wafer chuck heaters, electrostatic chuck heaters (ESC heaters), and chemical vapor deposition (CVD) equipment.
GORGEOUS CERAMICS (GGS) has partnered with numerous semiconductor equipment manufacturers and wafer foundries, custom-shipping multiple batches of aluminum nitride ceramic heating elements, which have received widespread acclaim.
Used in vacuum equipment
Aluminum nitride heaters can operate stably for extended periods in high vacuum environments without releasing contaminants, making them an ideal choice for vacuum systems.
Common applications include vacuum chamber heating, vacuum stage heating, sample heating platforms, vacuum transfer modules, and analytical instruments.
Characteristics of ALN heaters
Temperature Uniformity:
GORGEOUS CERAMICS (GGS) aluminum nitride heaters are made from highly thermally conductive aluminum nitride, ensuring excellent temperature uniformity over a wide temperature range (up to 790 degrees Celsius). This translates to temperature stability during wafer fabrication, ultimately improving product yield and production speed.
Space-Saving Design:
By co-sintering the resistance heating element and bulk RF electrode within the aluminum nitride ceramic, we have achieved a compact and efficient design for the aluminum nitride heater. This not only reduces the overall size of the equipment but also improves heating efficiency and heat transfer rate, thus saving valuable production space.
Коррозионная стойкость:
Aluminum nitride ceramic heaters exhibit excellent resistance to corrosion from halogen gases and oxidizing environments. This allows them to maintain long-term stability under high-temperature and continuous operation conditions, extending equipment life and reducing daily operating and maintenance costs.
Wafer Clamping Function Design Pending:
By sintering the RF electrode together with the ceramic plate, the aluminum nitride heater integrates the function of an electrostatic chuck electrode for wafer clamping. This feature simplifies your production process, thereby increasing production speed and efficiency—a highly valuable advantage in wafer fabrication.
Customized Solutions:
We understand that every manufacturing process has unique requirements. Therefore, we offer customized aluminum nitride heater solutions to meet your diverse needs. Whether it’s size, power requirements, or electrode configuration, we can tailor products to your specific manufacturing process for a perfect fit.
ALN Material Properties Data
The following table summarizes the key properties of AlN material:
Имя
Purity [%]
Density [g/cm³]
Volume Resistivity [Ωcm] (Room Temp.)
Thermal Conductivity [W/m·K] (Room Temp.)
Thermal Expansion Coefficient (1000℃)
Strength [MPa] (Room Temp.)
Young’s Modulus [GPa] (Room Temp.)
Dielectric Constant (13.56MHz, Relay)
AlN/Aluminum Nitride
95
3.3
>1E+15
170
5.7
>300
300
8.6
AlN/Aluminum Nitride
97
3.31
>1E+8 ~ +13
100
5.6
>300
300
8.8
AlN/Aluminum Nitride
99
3.32
>1E+15
80
5.6
>250
300
8.6
Часто задаваемые вопросы
What are the applications of aluminum nitride heaters?
Aluminum nitride heaters are primarily used in semiconductor equipment, vacuum systems, OLED manufacturing, laboratory instruments, medical devices, and laser equipment.
Why choose aluminum nitride heaters instead of alumina heaters?
Aluminum nitride heaters have a much higher thermal conductivity (several times that of alumina ceramics), enabling faster heat transfer, better temperature uniformity, and superior thermal management.
Can GORGEOUS CERAMICS (GGS) aluminum nitride heaters be customized?
Yes. Customization is available for dimensions, thickness, heating circuit, operating voltage, power density, temperature sensors (e.g., thermocouples or RTDs), mounting holes, metallization, and surface treatments.
What is the maximum operating temperature of aluminum nitride heaters?
Aluminum nitride heaters typically operate continuously within a temperature range of 400°C to 800°C.
